Thin Films Systems
Thin Film Systems has rapidly emerged as the low k leader for 65/45 nm nodes and beyond. FUJIFILM Electronic Materials has developed proprietary separation technologies and expertise that allow the OEMs and end users to quickly get novel ultra-pure chemistries for their processes. State of the art container cleaning coupled with strong process control ensures lot to lot consistency at the fab. Strategically providing time saving turn-key solutions as well as next generation technology, the Thin Film Systems group is dedicated to being the prominent supplier to OEMs and end users.
Focusing on lowering the cost of ownership to our customers, the current product portfolio is as follows:
Advanced Low K Dielectrics
- OEM qualified
- Ultra-low k products and R&D
- Designed for 65, 45, 32, 22 nodes and beyond
Current Generation Low K
GenStream© Chemical Delivery Systems
- Tube Heaters
- Integrated Level Control and monitoring
- Electrical / Mechanical interconnections
- Custom engineering
- SS Ampules
- Quartz Ampules
- Dynamax Bulk Containers
Dielectric and Dopant Sources
Dielectrics/Dopant Blends – Custom blends may be available – ask us!
Silicon Dopant Sources
Chlorine Sources
Other Ultra-Pure Products
The Thin Film Systems group utilizes its robust portfolio and works closely with the OEM’S and end user customer base to ensure the best combination of products are seamlessly integrated into their processes. This proven strategy provides a winning environment that allows growth and innovation for all our customers.
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